JPS5977307A - 浮動スペーシング測定方法 - Google Patents
浮動スペーシング測定方法Info
- Publication number
- JPS5977307A JPS5977307A JP18743882A JP18743882A JPS5977307A JP S5977307 A JPS5977307 A JP S5977307A JP 18743882 A JP18743882 A JP 18743882A JP 18743882 A JP18743882 A JP 18743882A JP S5977307 A JPS5977307 A JP S5977307A
- Authority
- JP
- Japan
- Prior art keywords
- spacing
- light
- magnetic head
- output
- interference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B33/00—Constructional parts, details or accessories not provided for in the other groups of this subclass
- G11B33/10—Indicating arrangements; Warning arrangements
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B5/60—Fluid-dynamic spacing of heads from record-carriers
- G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18743882A JPS5977307A (ja) | 1982-10-27 | 1982-10-27 | 浮動スペーシング測定方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18743882A JPS5977307A (ja) | 1982-10-27 | 1982-10-27 | 浮動スペーシング測定方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5977307A true JPS5977307A (ja) | 1984-05-02 |
JPH0467124B2 JPH0467124B2 (en]) | 1992-10-27 |
Family
ID=16206059
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18743882A Granted JPS5977307A (ja) | 1982-10-27 | 1982-10-27 | 浮動スペーシング測定方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5977307A (en]) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63136369A (ja) * | 1986-11-26 | 1988-06-08 | Fujitsu Ltd | 浮上式ヘツドの浮上量試験方法 |
JP2008228739A (ja) * | 2008-05-21 | 2008-10-02 | Yanmar Co Ltd | ロータリー耕耘装置 |
JP2015102333A (ja) * | 2013-11-21 | 2015-06-04 | 学校法人福岡大学 | 円二色性スペクトル及び円偏光蛍光を同一の光学系で測定する方法及び装置 |
-
1982
- 1982-10-27 JP JP18743882A patent/JPS5977307A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63136369A (ja) * | 1986-11-26 | 1988-06-08 | Fujitsu Ltd | 浮上式ヘツドの浮上量試験方法 |
JP2008228739A (ja) * | 2008-05-21 | 2008-10-02 | Yanmar Co Ltd | ロータリー耕耘装置 |
JP2015102333A (ja) * | 2013-11-21 | 2015-06-04 | 学校法人福岡大学 | 円二色性スペクトル及び円偏光蛍光を同一の光学系で測定する方法及び装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0467124B2 (en]) | 1992-10-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5280340A (en) | Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings | |
CN100543407C (zh) | 动态参考平面补偿 | |
US5319442A (en) | Optical inspection probe | |
JPS63153456A (ja) | 光デイスクテストシステム | |
JPH08507384A (ja) | 小さいスペーシングの干渉測定に関して、強度を較正し干渉縞のオーダを決定する方法および装置 | |
US5673110A (en) | Multiplexed laser interferometer for non-dispersed spectrum detection in a dynamic flying height tester | |
US7724375B1 (en) | Method and apparatus for increasing metrology or inspection tool throughput | |
US4991162A (en) | Testing apparatus and method for optical data storage medium | |
JPS5977307A (ja) | 浮動スペーシング測定方法 | |
GB2175394A (en) | Measuring dimensions of small objects | |
JP3988859B2 (ja) | 光ディスク検査装置 | |
US20100128282A1 (en) | Phase difference comparison to measure very small spacing between bodies | |
JP2557650B2 (ja) | 試料形状測定装置 | |
JPS63222208A (ja) | 凹部深さ測定装置 | |
JPS63222207A (ja) | 凹部深さ・膜厚測定装置 | |
JP2536059B2 (ja) | 物体の表面状態測定装置及び表面の高さ測定装置 | |
JPH01406A (ja) | 試料形状測定装置 | |
JPH02140608A (ja) | 表面形状測定装置 | |
JPH10318729A (ja) | 非接触表面形状測定方法及びその装置 | |
JPH0511642Y2 (en]) | ||
JPS63290903A (ja) | 間隙測定装置 | |
JPH01242906A (ja) | 光切断法における線化方法 | |
WO1999008066A1 (en) | Interference method and system for measuring the thickness of an optically-transmissive thin layer formed on a relatively planar, optically-reflective surface | |
JPH1123229A (ja) | 膜厚測定方法 | |
JPS62212545A (ja) | 光特性測定装置 |